硅基超薄多孔氧化铝膜的制备
杨昊炜;张璋;段晓楠;俞宏坤;金庆原
Fabrication of Ultra Thin Porous Alumina Membrane on Silicon Substrate
YANG Hao-Wei; ZHANG Zhang; DUAN Xiao-Nan; YU Hong-Kun; JIN Qing-Yuan
物理化学学报 . 2008, (02): 313 -316 .  DOI: 10.3866/PKU.WHXB20080222