制备类金刚石薄膜过程中的等离子体发射光谱

doi:10.3866/PKU.WHXB19920318

Acta Phys. -Chim. Sin. ›› 1992, Vol. 8 ›› Issue (03): 383-388.doi: 10.3866/PKU.WHXB19920318

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Optical Emission Spectroscopy in Diamond-Like Carbon Film Deposition

Zhang Wei-Ping; Chen Jing; Fang Rong-Chun; Hu Ke-Liang

Department of Physics, University of science and Technology of China, Hefei 230026

Received:1991-02-10 Revised:1991-10-06 Published:1992-06-15
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Abstract

Abstract: We measured the optical emission spectra (OES) of glow discharged plasma of methane in the diamond-like carbon film deposition and analyzed the relationship between the OES and the deposition parameters, such as rf power, gas pressure and the distances from the lower electrode.
The infrared absorption of films were also measured and the results of infrared absorption were compared with that of OES measurement.

Key words: Optical emission spectroscopy, Glow discharge, Diamond-like carbon film

Zhang Wei-Ping; Chen Jing; Fang Rong-Chun; Hu Ke-Liang. Optical Emission Spectroscopy in Diamond-Like Carbon Film Deposition[J]. Acta Phys. -Chim. Sin. 1992, 8(03), 383-388. doi: 10.3866/PKU.WHXB19920318

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Optical Emission Spectroscopy in Diamond-Like Carbon Film Deposition

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