Abstract: The density functional theory and ab initio molecular dynamic method were applied on the radical initiated chain reaction of unsaturated 1-alkene molecules on H-terminated Si(100)-2×1 surface. The results showed that the crucial step of the surface chain reaction, namely, the abstraction of a H atom from a nearby surface hydride unit, had a somewhat smaller activation energy from the nearest silicon site than that from the next nearest silicon site. Ab initio molecular dynamics showed that the H-abstraction on Si(100)-2×1 surface bound organic group with a carbon-centered radical was very easy to be obtained from the transition state, and a new silicon dangling bond was produced to lead to a surface chain reaction.

Key words: Ab initio molecular dynamic, H-terminated, Radical initiated chain reaction, H-abstraction