Abstract: The supersonic molecular beam technique is used to study the dynamics of laser-induced surface reactions of Ta surface with chlorine at three different wavelengths (355, 560, 1064 nm). The mass and velocity distributions of the reaction products are determined by the time-resolved mass spectrometry. The observed time-of-flight(TOF) spectra of the products show that the main products are TaCl, TaCl_2, TaCl_3 and TaCl_4 and there is no TaCl_5 observed. Their TOF spectra can be fitted with Maxwell-Boltz-mann distributions at translational temperatures in the range of 500-1500 K. The effect of translational energy of incident Cl_2 molecules and laser fluences on the laserinduced Cl_2-Ta surface reactions at different wavelengths are presented. Finally, the possible reaction mechanism is discussed based on the experimental observations.