原位椭圆偏振光谱研究多孔阳极氧化铝初期生长过程

doi:10.3866/PKU.WHXB20100846

Abstract

Abstract:

The initial stages of the anodization of aluminum are influential during the preparation of anodic aluminum oxide nanotemplates and provide an insight into their formation mechanism. The formation and development of both the barrier layer and the porous layer are involved. In this paper, in situ ellipsometric spectra with a high time-resolution were collected. To deconvolute the ellipsometric spectra, several optical models were extracted from the physical models of the Al-H₂SO₄ interface. Using these models and the effective medium approximation, detailed information about the composition and thickness of the Al₂O₃-Al interphase, Al₂O₃ barrier layer, and porous layer was acquired. Based on the deconvoluted results and the optical models, 4 stages of the porous anodization of aluminum, i.e., the barrier layer grows, pores form, pores enlarge, and pores grow at a stable rate, were clearly distinguished. Moreover, during the last stage the thickness of the porous layer changes linearly with time at a rate of 5.8 nm·s^-1 while both the thickness of the barrier layer and the porosity of the porous layer change very little.

Key words: Aluminum, Anodization, Template, Spectroscopic ellipsometry, Effective medium approximation

LEI Jing-Lei, ZHANG Li-Na, LI Ling-Jie, ZHENG Sha, WANG Chao, XIE Zhao-Ming, ZHANG Sheng-Tao. In situ Ellipsometric Study on the Initial Stages of Porous Anodization of Aluminum[J]. Acta Phys. -Chim. Sin. 2010, 26(09), 2392-2396. doi: 10.3866/PKU.WHXB20100846

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In situ Ellipsometric Study on the Initial Stages of Porous Anodization of Aluminum

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