Acta Phys. -Chim. Sin. ›› 2012, Vol. 28 ›› Issue (06): 1533-1538.doi: 10.3866/PKU.WHXB201203191

• PHYSICAL CHEMISTRY OF MATERIALS • Previous Articles     Next Articles

Optical and Phase Transition Properties of TixV1-xO2 Thin Films

HU Wen-Liang1,2,3, XU Gang1,2, MA Jian-Wei1,2,4, XIONG Bin1,2,3, SHI Ji-Fu1,2   

  1. 1. Guangzhou Institute of Energy Conversion, Chinese Academy of Sciences, Guangzhou 510640, P. R. China;
    2. Key Laboratory of Renewable Energy and Gas Hydrate, Chinese Academy of Sciences, Guangzhou 510640, P. R. China;
    3. Graduate University of Chinese Academy of Sciences, Beijing 100049, P. R. China;
    4. Civil Engineering Institute, Northeast Petroleum University, Daqing 163318, Heilongjiang Province, P. R. China
  • Received:2011-12-13 Revised:2012-03-16 Published:2012-05-17
  • Contact: XU Gang E-mail:xugang@ms.giec.ac.cn
  • Supported by:

    The project was supported by the National Natural Science Foundation of China (51102235), Guangdong Industry-University-Research Collaboration, China (2010B090400109), and Strategic Collaboration of Guangdong and Chinese Academy of Sciences (2011B090300044).

Abstract: TixV1-xO2 (0≤x≤1) thin films with different molar ratios of V/Ti were prepared on c-plane sapphire (0001) substrates by radio frequency magnetron sputtering. The microstructure and optical properties of the thin films were determined by X-ray diffraction (XRD), Raman spectroscopy, and UV-visible-near infrared (UV-Vis-NIR) spectroscopy. The width of the optical band gap was calculated and the integrated solar transmittance of the films was characterized. As the content of titanium was increased, infrared regulation and thermal hysteresis were gradually reduced until they disappeared. The results show that the band gap of the thin films broadens as the content of titanium increases, causing the optical absorption edge to exhibit a blue shift. Conversely, the band gap narrows as the proportion of vanadium is increased, which causes a red shift of the optical absorption edge.

Key words: VO2 thin film, TiO2 thin film, Magnetron sputtering, Optical property, Phase transition property