Electrodeposition of Copper in a Citrate Bath and Its Application to a Micro-Electro-Mechanical System
WU Wei-Gang, YANG Fang-Zu, LUO Ming-Hui, TIAN Zhong-Qun, ZHOU Shao-Min
Acta Phys. -Chim. Sin. . 2010, (10): 2625 -2632 .  DOI: 10.3866/PKU.WHXB20101002