物理化学学报 >> 2008, Vol. 24 >> Issue (06): 1080-1084.doi: 10.3866/PKU.WHXB20080629

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单根ZnO纳米线的室温气敏特性

郑凯波; 李静雷; 沈浩颋; 孙大林; 陈国荣   

  1. 复旦大学材料科学系, 上海 200433
  • 收稿日期:2007-12-12 修回日期:2008-03-16 发布日期:2008-06-03
  • 通讯作者: 陈国荣 E-mail:grchen@fudan.edu.cn

Gas Sensing Properties of Single ZnO Nanowire at Room Temperature

ZHENG Kai-Bo; LI Jing-Lei; SHEN Hao-Ting; SUN Da-Lin; CHEN Guo-Rong   

  1. Department of Materials Science, Fudan University, Shanghai 200433, P. R. China
  • Received:2007-12-12 Revised:2008-03-16 Published:2008-06-03
  • Contact: CHEN Guo-Rong E-mail:grchen@fudan.edu.cn

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摘要： 利用改进的CVD法制备了(002)面取向生长的ZnO纳米线, 通过光刻/剥离的自下而上的组装技术制备了基于单根ZnO纳米线的气敏元件, 其中的ZnO纳米线直径为50-300 nm, 有效长度为2-10 μm. 测试表明在室温条件下, 元件对浓度为500 μL·L-1的氧气和乙醇的灵敏度可以分别达到1.3 和1.2, 而气敏响应时间分别为10 和5 s, 由于单根纳米线的一维小尺寸结构加剧了电流的自加热效应, 因此元件在外界环境为室温的条件下的灵敏度才略有提高.

关键词: 氧化锌, 纳米线, 气敏

Abstract: ZnO nanowires with (002) oriented direction was synthesized via modified CVD method. Bottom-up assembly including photolithography/lift off was employed to fabricate gas sensor based on single ZnO nanwire with 50-300 nm in diameter and 2-10 μm in length. The as-prepared device showed gas sensitivities of 1.3 and 1.2 to oxygen and ethanol gases with concentration of 500 μL·L-1 at room temperature, and the corresponding temporal responses were 10 and 5 s, respectively. The improved gas sensing properties were attributed to the enhancement of the current-induced heating on the quasi-one-dimensional nanostructure.

Key words: ZnO, Nanowire, Gas sensor