物理化学学报 >> 2008, Vol. 24 >> Issue (09): 1597-1601.doi: 10.3866/PKU.WHXB20080912

研究论文 上一篇    下一篇

锂掺杂ZnO陶瓷靶材制备及其掺杂引起的缺陷

唐立丹; 顾有松; 张跃; 刘邦武; 杨亚; 秦子   

  1. 北京科技大学材料物理与化学系, 北京 100083; 北京科技大学新金属材料国家重点实验室, 北京 100083
  • 收稿日期:2008-02-25 修回日期:2008-04-23 发布日期:2008-09-10
  • 通讯作者: 张跃 E-mail:yuezhang@ustb.edu.cn

Fabrication and Li-Related Impurity of ZnO Ceramic Target

TANG Li-Dan; GU You-Song; ZHANG Yue; LIU Bang-Wu; YANG Ya; QIN Zi   

  1. Department of Materials Physics, University of Science and Technology Beijing, Beijing 100083, P. R. China; State Key Laboratory for Advance Metals and Materials, University of Science and Technology Beijing, Beijing 100083, P. R. China
  • Received:2008-02-25 Revised:2008-04-23 Published:2008-09-10
  • Contact: ZHANG Yue E-mail:yuezhang@ustb.edu.cn

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摘要： 采用燃烧合成和放电等离子烧结方法制备锂掺杂ZnO陶瓷靶材. 利用XRD, SEM, TEM和激光粒径分析等手段分析合成粉体与陶瓷的显微结构. 结果表明, 锂掺杂ZnO粉体与陶瓷均为纤锌矿结构, 无其他相存在; 粉体的粒径分布为0.18-1.7 μm, 烧结体致密度较高, 晶粒尺寸为1-3 μm. 此外, 分析锂元素在烧结过程中引起掺杂缺陷变化, 锂元素由ZnO晶格的间隙位置转移为替代锌晶格位置, 实现受主掺杂, 为实现p型ZnO薄膜的制备奠定基础.

关键词: 燃烧合成, 放电等离子烧结, Li相关缺陷

Abstract: Li doping ZnO powders had been synthesized by using carbamide and glycine as fuel and zinc nitrate as oxidant. And then the as-synthesized powders were sintered by spark plasma sintering (SPS). XRD, SEM, and TEM were employed to characterize the microstructure and phase. The results showed that both Li doping ZnO powders and cramic were wurtzite without any other phases, the grain sizes of the powder and ceramic were 0.18-1.7 μm and 1-3 μstudied by XRD analysis. Li element occupied an interstitial site in ZnO powders and a substitutional site in ZnO target, a consequence of the Zn2+ ion being replaced by Li+, which introduced an acceptor level into the crystal. The results showed that the Li doping ZnO ceramic used as sputtering target was beneficial to the preparation of p-type ZnO film.

Key words: Combustion synthesis, Spark plasma sintering, Li-related impurity