物理化学学报 >> 1996, Vol. 12 >> Issue (02): 102-104.doi: 10.3866/PKU.WHXB19960202

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金刚石膜生长过程原位光发射谱研究

崔景彪,方容川   

  1. 中国科技大学物理系，结构分析开放实验室，合肥 230026
  • 收稿日期:1995-10-24 修回日期:1995-11-23 发布日期:1996-02-15
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Investigation of Diamond Growth Process by in situ Optical Emission

Cui Jing-Biao,Fang Rong-Chuan   

  1. Department of Physics,Structure Research Laboratory,University of Science and Technology of China,Hefei 230026
  • Received:1995-10-24 Revised:1995-11-23 Published:1996-02-15
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关键词: 光发射谱, 反应基团, 电子增强热灯丝CVD

Abstract:

In situ optical emission spectra for an electron assisted hot filament diamond growth process were successfully measured with spatial resolution of better than 1 mm. The emission lines from atomic hydrogen, molecular hydrogen, CH and CH+ radicals were observed in the visible region. Effects of the substrate bias on emission spectra and diamond nucleation were also investigated. It is found that substrate bias can enhance the nucleation density, which may due to the changes of atomic hydrogen concentration and the increase of electron mean temperature.

Key words: Optical emission spectrum, Reaction species, Electron assisted hot filament CVD