物理化学学报 >> 2003, Vol. 19 >> Issue (08): 686-688.doi: 10.3866/PKU.WHXB20030802

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电子诱导脱附研究钨表面O2对N2的置换吸附

张彤;吴强;胡安;毛福明;杨学谦   

  1. 东南大学电子工程系,南京　210096; 南京大学固体微结构物理国家重点实验室,南京　210093;南京师范大学数学与计算机科学学院,南京　210097
  • 收稿日期:2002-11-25 修回日期:2003-03-06 发布日期:2003-08-15
  • 通讯作者: 张彤 E-mail:njutonnyz@sina.com

Study of Displacement Adsorption of N2 by O2 on Surface of Polycrystalline W via Threshold Energy of Electron-stimulated Desorption

Zhang Tong;Wu Qiang;Hu An;Mao Fu-Ming;Yang Xue-Qian   

  1. Electronic Engineering Department, Southeast University, Nanjing　210096; National Laboratory of Solid State Microstructures and Physics Department, Nanjing University, Nanjing　210093; School of Mathematics ＆ Computer Science, Nanjing Normal University, Nanjing　210097
  • Received:2002-11-25 Revised:2003-03-06 Published:2003-08-15
  • Contact: Zhang Tong E-mail:njutonnyz@sina.com

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摘要： 实验测量了室温高真空条件下,多晶W表面O2和N2的电子诱导脱附（ESD）阈值能量.O2-W吸附对的ESD能量约为15.5 eV, N2-W吸附对的ESD能量约为13.8 eV.实验结果具有良好的可重复性.利用ESD阈值能量研究了多晶W表面O2对N2的置换吸附过程,表明在一定的时间间隔内,O2可以置换吸附在多晶W表面的N2,且该过程不可逆.对实验结果进行了分析.

关键词: 电子诱导脱附, 阈值能量, 置换, 吸附, 信号调制法

Abstract: The threshold energies of electron-stimulated desorption of N2 and O2 from polycrystalline W in vacuum (1×10－3 Pa) at T=300 K are measured. For O2-W couple, the threshold energy is about 15.5 eV; For N2-W couple, the threshold energy is about 13.8 eV. The displacement adsorption of N2 by O2 from the surface of polycrystalline W is studied using the measured threshold energy. The result shows that within a given time interval, N2 could be displaced by O2 on the surface of W, but the opposite process could not occur.

Key words: Electron-stimulated desorption, Threshold energy, Displacement, 　Adsorption, Modulation