物理化学学报 >> 2006, Vol. 22 >> Issue (11): 1413-1418.doi: 10.3866/PKU.WHXB20061121

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含氮磷酸锂薄膜在空气中的稳定性

刘文元;李驰麟;傅正文   

  1. 复旦大学化学系激光化学研究所, 上海 200433; 西北核技术研究所, 西安 710024)
  • 收稿日期:2006-05-20 修回日期:2006-06-21 发布日期:2006-11-06
  • 通讯作者: 刘文元 E-mail:021022043@fudan.edu.cn

Stability of Lithium Phosphorous Oxynitride Thin Films in Humid Air

LIU Wen-Yuan;LI Chi-Lin;FU Zheng-Wen   

  1. Laser Chemistry Institute & Department of Chemistry, Fudan University, Shanghai 200433, P. R. China; Northwest Institute of Nuclear Technology, Xi′an 710024, P. R. China
  • Received:2006-05-20 Revised:2006-06-21 Published:2006-11-06

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摘要： 利用射频(RF)磁控溅射方法制备了含氮磷酸锂(LiPON)薄膜. 采用SEM、XRD、XPS等技术以及交流阻抗法和电位线性扫描法, 研究了空气湿度对LiPON薄膜形貌、组成和性能的影响. 结果表明, LiPON薄膜在湿度为40%的空气环境中放置24 h后, 将发生明显的水解反应, 使LiPON薄膜表面形貌变得疏松、局部突起; PH3和NH3的产生, 使薄膜中磷元素和氮元素含量减少, 而Li2CO3的生成, 则使薄膜中碳元素和氧元素含量有明显的增加. LiPON电解质薄膜形貌和组成的变化, 造成了薄膜电化学性能的严重恶化.

关键词: LiPON薄膜, 薄膜电解质, 磁控溅射, 全固态薄膜锂电池

Abstract: Lithium phosphorus oxynitride (LiPON) thin films were prepared by radio frequency (RF) magnetron sputtering. The morphology, composition and electrochemical performance of LiPON electrolyte thin films placed in humid ambient were investigated using SEM, XRD and XPS, and electrochemical measurements of AC (alternating current) impedance and potential linear scanning, respectively. Obvious changes in surface morphology, composition and electrochemical properties were found for the as-deposited LiPON film placed in humid ambient with a relative humidity of 40% for 24 h. Results showed that the uniformity of the film surface became poor, the contents of phosphorous and nitrogen in LiPON film decreased due to its reaction with H2O, releasing gaseous PH3 and NH3. In addition, the formation of Li2CO3 obviously increased the contents of carbon and oxygen in LiPON film. Therefore, LiPON thin films placed in humid ambient resulted in a bad effect on its electrochemical performance such as the ionic conductivity and the electrochemical stability window.

Key words: LiPON thin films, Thin film electrolyte, Magnetron sputtering, All-solid-state thin film lithium battery