物理化学学报 >> 2006, Vol. 22 >> Issue (01): 124-130.doi: 10.3866/PKU.WHXB20060125

综述 上一篇    

扫描探针显微术在巯醇自组装单分子膜纳米刻蚀中的应用

赵健伟; 阚蓉蓉; 章岩; 陈洪渊   

  1. 南京大学化学化工学院, 生命分析化学教育部重点实验室, 南京 210093
  • 收稿日期:2005-05-30 修回日期:2005-07-19 发布日期:2006-01-15
  • 通讯作者: 赵健伟 E-mail:zhaojw@nju.edu.cn

Applications of Scanning Probe Microscopy in Nanolithography on Alkanethiol Self-assembled Monolayers

ZHAO Jian-wei; KAN Rong-rong; ZHANG Yan; CHEN Hong-yuan   

  1. Key Laboratory of Analytical Chemistry for Life Science(Education Ministry of China), College of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210093, P. R. China
  • Received:2005-05-30 Revised:2005-07-19 Published:2006-01-15
  • Contact: ZHAO Jian-wei E-mail:zhaojw@nju.edu.cn

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摘要： 介绍了近十年来扫描探针显微术(SPM)在巯醇自组装单分子膜纳米刻蚀中的应用. 依据扫描探针的工作原理, 依次讨论了扫描隧道显微镜、原子力显微镜和导电原子力显微镜的工作特点和适用范围. 同时也讨论了自组装单分子膜纳米刻蚀术在生物分子传感器、超高密度信息存储等领域的应用前景.

关键词: 扫描探针显微术, 自组装膜, 扫描隧道显微镜, 原子力显微镜, 纳米刻蚀

Abstract: Recent progress in the field of nanolithography of self-assembled monolayers by scanning probe microscopy (SPM), which is important in microelectronics and sensor technology, is introduced in the paper. According to the working principle, scanning probe lithography (SPL) can be classified into three categories, namely STM-based nanolithography, AFM-based nanolithography, and C-AFM-based nanolithography. SPL is a pivot of the fundamental study in the field of nanolithography for its high spatial resolution, ease in fabrication and good controllability in operation. The possible application in information storage has been discussed as well.

Key words: Scanning probe microscopy, Self-assembled monolayer, Scanning tunneling microscope, Atomic force microscope, Nanolithography