物理化学学报 >> 2008, Vol. 24 >> Issue (04): 571-575.doi: 10.1016/S1872-1508(08)60024-8

研究论文 上一篇    下一篇

6H-SiC/3C-SiC/6H-SiC量子阱结构制备及其发光特性

刘金锋; 刘忠良; 任鹏; 徐彭寿; 陈秀芳; 徐现刚   

  1. 中国科学技术大学国家同步辐射实验室, 合肥 230029; 中国工程物理研究院流体物理研究所, 四川 绵阳 621900; 山东大学晶体材料国家重点实验室, 济南 250100
  • 收稿日期:2007-11-12 修回日期:2008-01-03 发布日期:2008-04-07
  • 通讯作者: 徐彭寿 E-mail:psxu@ustc.edu.cn

Fabrication and Luminescent Properties of 6H-SiC/3C-SiC/6H-SiC Quantum Well Structure

LIU Jin-Feng; LIU Zhong-Liang; REN Peng; XU Peng-Shou; CHEN Xiu-Fang; XU Xian-Gang   

  1. National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, P. R. China; Institute of Fluid Physics, China Academy of Engineering Physics, Mianyang 621900, Sichuan Province, P. R. China; State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, P. R. China
  • Received:2007-11-12 Revised:2008-01-03 Published:2008-04-07
  • Contact: XU Peng-Shou E-mail:psxu@ustc.edu.cn

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摘要： 利用固源分子束外延(SSMBE)生长技术, 在1350K的衬底温度下, 通过改变Si束流强度, 在6H-SiC(0001)面上外延生长6H-SiC/3C-SiC/6H-SiC量子阱结构薄膜, 并用反射高能电子衍射(RHEED)与光致发光(PL)谱对生长的薄膜的晶型和发光特性进行表征. RHEED 结果显示生长的薄膜为6H-SiC/3C-SiC/6H-SiC量子阱结构薄膜. 室温下He-Gd激光激发的光致发光(PL)谱显示, 薄膜在480-600 nm范围内存在衬底未观察到的较强发光. 拟合得到的发光峰与依据量子阱结构模型计算出的发光位置较为一致. 由此表明, 该强发光带可能是6H-SiC/3C-SiC/6H-SiC量子阱结构的发光.

关键词: 量子阱, 碳化硅, 固源分子束外延, 反射高能电子衍射, 光致发光

Abstract: Quantumwell structure filmof 6H-SiC/3C-SiC/6H-SiC was fabricated on 6H-SiC(0001) with the substrate temperature of 1350 K by solid source molecular beam epitaxy (SSMBE) through the variation of Si flux rate. The crystal polytypes and luminescent properties of the film were characterized by reflection high energy electron diffraction (RHEED) and photoluminescence (PL), respectively. The results of RHEEDindicated that the filmwas 6H-SiC/3C-SiC/6H-SiC with the quantum well structure. The results of PL excited by He-Gd laser at room temperature showed that there were intense emissions in the range of 480-600 nm, which could not be observed from the substrate. The fitting peaks were consistent with the results calculated from the model of quantum well structure, which showed that such intense emissions were probably fromthe quantumwells with different widths.

Key words: Quantumwell, SiC, SSMBE, RHEED, Photoluminescence