微圆盘电极技术测定表面化学微加工时的约束刻蚀剂浓度分布
汤儆;马信洲;何辉忠;张力;林密旋;曲东升;丁庆勇;孙立宁
Concentration Protile of Etchant Measured by Microelectrode Technique in the Process of Chemical Micromachining
TANG Jing;MA Xin-Zhou;HE Hui-Zhong;ZHANG Li;LIN Mi-Xuan;QU Dong-Sheng2 DING Qing-Yong;SUN Li-Ning
物理化学学报
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2006, (04): 507
-512
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DOI: 10.3866/PKU.WHXB20060423
