Abstract: Three-dimensionally ordered macroporous(3DOM) SiC patterns were fabricated successfully on silicon substrate using polydimethylsiloxane (PDMS) elastometric stamp as mold, silica spheres as template, polycarbosilane (PCS) as preceramic polymer. The preparing process included the formation of patterned silica template, precursor infiltration into the template, curing of the precursor, demolding of PDMS mold, pyrolysis of the cured preceramic polymer pattern and etching of the silica template. The results show that the dimension of SiC pattern can be controlled by using PDMS molds with different dimensions and the pore diameter in the patterned porous ceramic can be tailored by using different sizes of silica sphere template. The pores pack together to be a three-dimensionally ordered structure and the small windows originated from the contacting points of the silica spheres endow the porous patterns with a three-dimensionally penetrated structure. The prepared macroporous ceramic patterns will be potentially applied in chemical harsh conditions due to the advanced properties of the SiC ceramic.

Key words: Pattern, Templated technique, Preceramic polymer conversion technique, 3DOMmaterial, SiC ceramic