Acta Phys. -Chim. Sin. ›› 2006, Vol. 22 ›› Issue (01): 124-130.doi: 10.3866/PKU.WHXB20060125

• Review • Previous Articles    

Applications of Scanning Probe Microscopy in Nanolithography on Alkanethiol Self-assembled Monolayers

ZHAO Jian-wei; KAN Rong-rong; ZHANG Yan; CHEN Hong-yuan   

  1. Key Laboratory of Analytical Chemistry for Life Science(Education Ministry of China), College of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210093, P. R. China
  • Received:2005-05-30 Revised:2005-07-19 Published:2006-01-15
  • Contact: ZHAO Jian-wei

Abstract: Recent progress in the field of nanolithography of self-assembled monolayers by scanning probe microscopy (SPM), which is important in microelectronics and sensor technology, is introduced in the paper. According to the working principle, scanning probe lithography (SPL) can be classified into three categories, namely STM-based nanolithography, AFM-based nanolithography, and C-AFM-based nanolithography. SPL is a pivot of the fundamental study in the field of nanolithography for its high spatial resolution, ease in fabrication and good controllability in operation. The possible application in information storage has been discussed as well.

Key words: Scanning probe microscopy, Self-assembled monolayer, Scanning tunneling microscope, Atomic force microscope, Nanolithography