Abstract: MoO2 nano-arrays were simply prepared by reduction of thermally diffused MoO3 on anodic aluminum oxide(AAO) template. The structure and morphology of the nano-arrays were studied by XRD, SEM, TEM and HRTEM. The results showed that, after hydrogenation of the evaporates under 600 ℃ in H2/N2 mixture, single crystalline MoO2 nanotubes/nanowires were produced on 70 nm AAO template, while on 50 nm AAO template yielded was the piling-up of MoO2 nanocrystallites in nanotubes. Addition of ethanol into the powdered MoO3 precursors greatly improved the morphology of the nanowires. Further reduction of MoO2 at above 650 ℃ in H2 led to the production of Mo nanotube arrays.

Key words: Mo, MoO_x, Anodic aluminum oxide(AAO), Template, Nano-arrays, Thermal diffusion