物理化学学报 >> 2007, Vol. 23 >> Issue (03): 361-366.doi: 10.1016/S1872-1508(07)60027-8

研究论文 上一篇    下一篇

化学气相沉积法制备氧化锡自组装纳米结构

刘星辉;唐东升;曾春来;海阔;解思深   

  1. (湖南师范大学物理与信息科学学院, 长沙 410081; 中国科学院物理研究所, 北京 100080)
  • 收稿日期:2006-09-14 修回日期:2006-10-30 发布日期:2007-03-07
  • 通讯作者: 唐东升 E-mail:dstang@hunnu.edu.cn

Preparation of Tin Oxide Self-assembly Nanostructures by Chemical Vapor Deposition

LIU Xing-Hui;TANG Dong-Sheng;ZENG Chun-Lai;HAI Kuo;XIE Si-Shen   

  1. (College of Physics and Information Science, Hunan Normal University, Changsha 410081, P. R. China; Institute of Physics, Chinese Academy of Sciences, Beijing 100080, P. R. China)
  • Received:2006-09-14 Revised:2006-10-30 Published:2007-03-07
  • Contact: TANG Dong-Sheng E-mail:dstang@hunnu.edu.cn

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摘要： 采用化学气相沉积法在镀有5-10 nm厚金膜的SiO2衬底上, 通过控制生长条件, 实现了二氧化锡纳米结构的自组装生长, 成功制备出了莲花状和菊花状的二氧化锡自组装纳米结构. 利用扫描电子显微镜、X射线衍射等表征分析手段对样品的表面形貌、结构及成份进行表征和研究. 并在此基础上, 讨论了两种自组装纳米结构的生长机制.

关键词: 化学气相沉积, 氧化锡, 可控制生长

Abstract: Two types of tin oxide self-assembly nanostructures, lotus flower-shaped and chrysanthemum-shaped, were synthesized by chemical vapor deposition method using gold nanoparticles as catalyst. The lotus flower-shaped tin oxide nanostructure comprised a disc with meshes in nanoscale and a thin film of nanowires, whereas the chrysanthemum-shaped tin oxide nanostructure comprised nanowires or nanobelts in a radicalized arrangement. X-ray diffraction spectra indicated that the former was composed of Sn and SnO2 and the latter was composed of only SnO2. By adjusting these two suits of experimental parameters, such as pressure, temperature, flow rate carrier gas or oxygen in the carrier gas, and then characterizing the products with scanning electron microscopy and X-ray diffraction, possible growth mechanism for these two types of self-assembly tin oxide nanostructures was proposed.

Key words: Chemical vapor deposition, Tin oxide, Controllable growth