物理化学学报 >> 1997, Vol. 13 >> Issue (03): 218-223.doi: 10.3866/PKU.WHXB19970307

研究论文 上一篇    下一篇

Pd沉积在聚乙烯醇缩甲醛衬底上分形结构研究

魏赛珍,毛祖遂,汪雷,陈晓峰,郑永铭   

  1. 浙江大学物理系，杭州 310027|中国工程物理研究院高温高密度等离子体物理实验室，成都 610003
  • 收稿日期:1996-09-10 修回日期:1996-11-18 发布日期:1997-03-15
  • 通讯作者: 毛祖遂

The Fractal Structure Investigation of Pd Film Deposited on Polyvinyl Formal

Wei Sai-Zhen,Mao Zu-Sui,Wang Lei,Chen Xiao-Feng,Zheng Yong-Ming   

  1. Department of Physics,Zhejiang University,Hangzhou 310027|Plasma Physics Laboratory of High Temperature and High Density,Chengdu 610003
  • Received:1996-09-10 Revised:1996-11-18 Published:1997-03-15
  • Contact: Mao Zu-Sui

PDF

2465

赞

摘要：

用透射电子显微镜（TEM）研究了衬底温度和沉积速率对气相沉积在聚乙烯醇缩甲醛（Polyvinyl Formale, PVF）衬底上的Pd膜显微结构的影响，当衬底温度由高到低改变时，Pd膜结构由紧密岛向分形渐变，在233－253K时Pd股具有分形结构，用Sandbox方法测量了其分维数.在相同温度的衬底上，沉积速率不同时，其分形的图样不同.研究表明，上述分形结构是稳定的.利用有边缘扩散的DLA模型讨论了这些实验结果.

关键词: 分形结构, Pd膜, 低温, 聚乙烯醇缩甲醛

Abstract:

 The influence of substrate temperature and of deposition rate upon microstructure of Pd film deposited on Polyvinyl Formale (PVF) has been investigated using TEM. Transition from compact islands to fractal structures has been observed when substrate temperature decreased. The fractal structure appeared at 233-253K. The fractal dimension was measured using the Sandbox method. The fractal patterns of Pd film on PVF at the same temperature varied with changing deposition rate. These fractal structures are stable. The experimental results have been discussed using DLA(Diffusion -Limited-Aggregation) model with active edge diffusion.

Key words: Fractal structure, Pd film, Low temperature, Polyvinyl formale