物理化学学报 >> 1999, Vol. 15 >> Issue (05): 403-406.doi: 10.3866/PKU.WHXB19990504

研究论文 上一篇    下一篇

薄膜表面的分形特征

汤晓明, 魏赛珍, 毛祖遂, 李海洋, 陈晓峰, 郑永铭   

  1. 浙江大学物理系，杭州 310027|中国工程物理研究院高温高密度等离子体物理实验室，成都 610003
  • 收稿日期:1998-08-05 修回日期:1998-09-24 发布日期:1999-05-15
  • 通讯作者: 毛祖遂

Fractal Characteristics of Film Surface

Tang Xiao-Ming, Wei Sai-Zhen, Mao Zu-Sui, Li Hai-Yang, Chen Xiao-Feng, Zheng Yong-Ming   

  1. Physics Department,Zhejiang University,Hangzhou 310027|Plasma Physics Laboratory of High Temperature and High Density,Chengdu 610003
  • Received:1998-08-05 Revised:1998-09-24 Published:1999-05-15
  • Contact: Mao Zu-Sui

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摘要：

在计算机上用随机数相加的方法产生了一个分形表面，对这个表面的模拟测量表明，z方向分辨率变化对分形维数测量结果影响很小，x、y方向分辨率降低时会导致测量结果统计误差增大用扫描隧道显微镜（STM）测量了沉积在三种不同基底上的Au膜的分形维数．测得Au／陶瓷的分形维数D＝2.15，Au／光学玻璃的分形维数D＝2.06．Au／载玻片上各点的分形维数较不一致．同时讨论了多图方法中各单图曲线之间不衔接的原因．

关键词: 分形维数, 薄膜表面, 扫描隧道显微镜, 计算机模拟, 分辨率

Abstract:

A fractal surface was generated on computer by random addition method. The simulated measurement on this surface shows that z resolution has little effect on calculating fractal dimension D while the lower x y resolution causes larger statistic error. D was calculated for Au films on three kind of substfate using data from Scanning Tunneling Microscope(STM) images. D = 2. 15 for Au/ceramic, and D = 2. 06 for Au/optical glass. D has different values for different points on Au/general glass, the reason of mismatch between curves from STM images of different scan sizes was also discussed.

Key words: Fractal dimension, Film surface, STM, Computer simultion, Resolution