物理化学学报 >> 2003, Vol. 19 >> Issue (12): 1143-1145.doi: 10.3866/PKU.WHXB20031210

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微接触印刷法构造金属银的二维和准三维微图纹结构

刘建平;何平笙   

  1. 中国科学技术大学高分子科学与工程系，合肥　230026
  • 收稿日期:2003-05-15 修回日期:2003-07-07 发布日期:2003-12-15
  • 通讯作者: 何平笙 E-mail:hpsm@ustc.edu.cn

2D and Quasi-3D Patterned Microstructures of Silver Fabricated by Microcontact Printing

Liu Jian-Ping;He Ping-Sheng   

  1. Department of Polymer Science and Engineering， University of Science and Technology of China, Hefei　230026
  • Received:2003-05-15 Revised:2003-07-07 Published:2003-12-15
  • Contact: He Ping-Sheng E-mail:hpsm@ustc.edu.cn

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摘要： 以聚二甲基硅氧烷（PDMS）有机硅橡胶为弹性印章，以十八烷基三氯硅烷（OTS）正已烷溶液为“墨水”，用微接触印刷分别在普通盖玻片表面和直径为20 mm的试管外表面直接盖印，以及在直径为10 mm的玻璃棒表面进行滚动式微接触印刷盖印.将这些盖好印的基材放在化学镀银液中进行选择性镀银沉积，得到金属银在平面上的二维微结构和在曲面上的准三维微结构.这些微结构的显微照片显示，采用微接触印刷法制备的微图纹结构，图纹转移效率高，精细度很好，特别是微接触印刷操作方法灵活多变，适用于多种形态的表面，是一类实用的微制造方法.

关键词: 微接触印刷, 银, 微结构, 化学沉积

Abstract: Microcontact printing(μCP) technology has been shown to be an easy,inexpensive and low-cost approach for microfabrication. We inked the poly(dimethylsiloxane) elastomeric stamp by rubbing the stamp gently with 10 mmol•L－1 octadeyl trichlorosilane(OTS) in hexane solution, then applied the dried stamp to cover glasses and the outer surface of tubes. We also micropatterned a glass rod surface by scrolling the rod on the patterned surface of an inked stamp. Patterned substrates were immersed in the silver plating bath for 30 min to selective deposition of silver on OTS free part of the substrates to obtain 2D and quasi-3D microstructure of silver. The microscope images show that microcontact printing technology can fabricate 2D and quasi-3D microstructure rapidly and easily, with high fidelity, which further demonstrates potential application of μCP in microfabrication technology.

Key words: Microcontact printing, Silver, Microstructure, Chemical deposition