物理化学学报 >> 2008, Vol. 24 >> Issue (11): 2122-2127.doi: 10.3866/PKU.WHXB20081131

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多壁碳纳米管互连的单壁碳纳米管晶体管的频率特性

朱玉振; 王胜; 魏贤龙; 丁力; 张志勇; 梁学磊; 陈清; 彭练矛   

  1. 北京大学电子学系, 纳米器件物理与化学教育部重点实验室, 北京 100871
  • 收稿日期:2008-05-19 修回日期:2008-07-16 发布日期:2008-11-10
  • 通讯作者: 梁学磊 E-mail:liangxl@pku.edu.cn

Frequency Response of SWCNT Field-Effect Transistors with MWCNT Interconnects

ZHU Yu-Zhen; WANG Sheng; WEI Xian-Long; DING Li; ZHANG Zhi-Yong; LIANG Xue-Lei; CHEN Qing; PENG Lian-Mao   

  1. Key Laboratory for the Physics and Chemistry of Nanodevices, Department of Electronics, Peking University, Beijing 100871, P. R. China
  • Received:2008-05-19 Revised:2008-07-16 Published:2008-11-10
  • Contact: LIANG Xue-Lei E-mail:liangxl@pku.edu.cn

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摘要： 用多壁碳纳米管(MWCNTs)作为互连线制备出了单壁碳纳米管场效应晶体管(SWCNT FETs), 对比研究了用多壁碳纳米管作为互连线和用金属作为互连线的两种情况. 结果表明, 二者的直流(DC)性能基本一致, 而用多壁碳纳米管作为互连线的交流(AC)性能略优于用金属作为互连的情况. 交流测量表明, 至少在20 MHz的频率下, 多壁碳纳米管互连的单壁碳纳米管晶体管仍有很好的响应速率, 器件能够正常工作.

关键词: 多壁碳纳米管, 互连线, 单壁碳纳米管, 场效应晶体管

Abstract: Single-walled carbon nanotube field-effect transistors (SWCNT FETs) with multi-walled carbon nanotubes (MWCNTs) as interconnects were fabricated, and their field effect properties were measured and compared with those of the case with metal leads as interconnects. Both cases showed almost the same direct current (DC) response, while the MWCNTs interconnected case showed a little better alternating current (AC) properties. AC measurement showed that the MWCNTs interconnected SWCNT FETs worked well at frequency up to 20 MHz.

Key words: Multi-walled carbon nanotube, Interconnect, Single-walled carbon nanotube, Field-effect transistor