Abstract: Anatase TiO2 thin films were obtained on a substrate at lowtemperature by addition of H3BO3 into （NH4）2TiF6 solution supersaturated with anatase nanocrystalline TiO2.Effect of concentration,/H3BO3 molar ratio, deposition time and reaction temperature on the surface structure and performance of deposited thin films were investigated.The transparence ,thickness,crystal structure and image of the deposited films were characterized by XRD,SEM,and UVVis absorption spectroscopy.Photocatalytic activity of the TiO2 thin films was evaluated by degradation of methylene blue.

Key words: Lowtemperature, Liquid phase deposition, Anatase, Transparent TiO₂ thin films, Photocatalysis