Acta Phys. -Chim. Sin. ›› 2012, Vol. 28 ›› Issue (04): 917-922.doi: 10.3866/PKU.WHXB201201172

• SOFT MATTER • Previous Articles     Next Articles

Preparation and Tribological Properties of Self-Assembled Composite Films on Silicon Surface

PAN He, TENG Shu-Hua, DING Cui-Cui   

  1. School of Materials Science and Engineering, China University of Mining and Technology, Xuzhou 221116, Jiangsu Province, P. R. China
  • Received:2011-09-26 Revised:2011-12-21 Published:2012-03-21
  • Contact: TENG Shu-Hua E-mail:shteng425@cumt.edu.cn
  • Supported by:

    The project was supported by the National Key Basic Research Program of China (973) (2007CB607605) and Fundamental Research Funds for the Central Universities, China (2011QNA06).

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Abstract: Composite films of 3-aminopropyltriethoxysilane (APTES)-SiO2-APTES were prepared on single-crystal silicon substrates using a self-assembly technique, and then their composition, structure, and tribological properties were characterized. The results showed that the composite films had a uniform and dense surface with an average roughness (Ra) of 0.963 nm and a contact angle of 63°. The atomic force microscopy (AFM) and transmission electron microscopy (TEM) observations revealed that, in the middle layer of the composite film, silica particles of 20-50 nm in diameter were uniformly deposited on the APTES layer. Compared to the APTES self-assembled monolayers (SAMs), the APTES-SiO2-APTES composite films exhibited a smaller friction coefficient and a longer wear life due to the introduction of the silica nano-particles.

Key words: Single-crystal silicon, Self-assembly, Composite film, Tribological property