物理化学学报 >> 2010, Vol. 26 >> Issue (01): 253-258.doi: 10.3866/PKU.WHXB20100108

材料物理化学 上一篇    下一篇

退火时间对6H-SiC(0001)表面外延石墨烯形貌和结构的影响

唐军, 刘忠良, 康朝阳, 闫文盛, 徐彭寿, 潘海斌, 韦世强, 高玉强, 徐现刚   

  1. 中国科学技术大学国家同步辐射实验室, 合肥 230029; 淮北煤炭师范学院物理与电子信息学院, 安徽 淮北 235000; 山东大学晶体材料国家重点实验室, 济南 250100
  • 收稿日期:2009-05-12 修回日期:2009-10-29 发布日期:2009-12-29
  • 通讯作者: 徐彭寿 E-mail:psxu@ustc.edu.cn

Annealing Time Dependence of Morphology and Structure of Epitaxial Graphene on 6H-SiC(0001) Surface

TANG Jun, LIU Zhong-Liang, KANG Chao-Yang, YAN Wen-Sheng, XU Peng-Shou, PAN Hai-Bin, WEI Shi-Qiang, GAO Yu-Qiang, XU Xian-Gang   

  1. National Synchrotron Radiation Laboratory, University of Science&Technology of China, Hefei 230029, P. R. China; School of Physics and Electronic Informantion, Huaibei Coal Industry Teachers College, Huaibei 235000, Anhui Province, P. R. China; State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, P. R. China
  • Received:2009-05-12 Revised:2009-10-29 Published:2009-12-29
  • Contact: XU Peng-Shou E-mail:psxu@ustc.edu.cn

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摘要：

在分子束外延(MBE)设备中, 采用高温退火的方法在6H-SiC(0001)表面外延石墨烯, 并研究了退火时间对外延石墨烯形貌和结构的影响. 利用反射式高能电子衍射(RHEED)、原子力显微镜(AFM)、激光拉曼光谱(Raman)和近边X射线吸收精细结构(NEXAFS)等实验技术对制备的样品进行了表征. RHEED结果发现, 不同退火时间的样品在SiC衍射条纹的外侧都出现了石墨烯的衍射条纹. AFM测试表明, 外延石墨烯的厚度随退火时间增加而增大, 且样品孔洞减少、表面更加平整. Raman测试表明, 外延石墨烯拉曼谱中2D峰和G峰的位置相对高定向热解石墨(HOPG)中2D峰和G峰的位置蓝移, 且退火时间增加, 峰的蓝移量减小. 对样品中碳原子K边NEXAFS谱测量显示, 样品中存在sp2杂化的碳原子, 退火时间增加使碳原子的1s→π以及1s→σ吸收的强度增大, 且1s电子到π态的吸收峰相对HOPG的向高能偏移.

关键词: Raman, 石墨烯, 6H-SiC, 退火时间, RHEED, AFM, NEXAFS

Abstract:

Epitaxial graphene layers were successfully grown onto Si-terminated 6H-SiC(0001) substrates by thermal annealing using an ultrahigh vacuum molecular beam epitaxy(MBE) chamber. The morphology and  structure of the samples annealed for different time were characterized by reflection high energy diffraction (RHEED), Raman spectroscopy, atomic force microscopy (AFM) and near edge X-ray absorption fine structure spectroscopy (NEXAFS). The graphene diffraction steaks were found in the RHEED patterns for all samples. AFM results showed that as the annealing time increased, the thickness of the graphene layers increased and the surface morphology appeared smoother with the out-of-order voids reduced. Raman results showed that the G peak and the 2D peak of graphene were obviously blue-shifted compared to those of highly-oriented pyrolytic graphite (HOPG). At longer annealing time, the amount of blue-shift decreased. C K-edge NEXAFS results revealed that the intensity of the resonance absorption peaks for 1s→π and 1s→σ for the sp2 hybridized C atoms increased when the samples were annealed over longer periods. The 1s→π peaks of these samples were at higher energies compared to those of HOPG.

Key words: Raman, Graphene, 6H-SiC, Annealing time, RHEED, AFM, NEXAFS