耦合蝶形天线的石墨烯室温太赫兹探测器

doi:10.3866/PKU.WHXB202307012

物理化学学报 >> 2023, Vol. 39 >> Issue (10): 2307012.doi: 10.3866/PKU.WHXB202307012

耦合蝶形天线的石墨烯室温太赫兹探测器

杨嘉炜¹^,², 郑春阳²^,³, 庞亚会², 纪仲阳²^,⁴, 李雨芮²^,³, 胡嘉仪²^,³, 朱江瑞², 陆琪²^,⁵, 林立²^,³^,⁶, 刘忠范²^,³^,⁵^,⁷, 胡清梅²^,*(), 关宝璐¹^,*(), 尹建波²^,⁴^,*()

¹ 北京工业大学信息学部, 北京 100124
² 北京石墨烯研究院, 北京 100095
³ 北京大学前沿交叉学科研究院, 北京 100871
⁴ 北京大学电子学院, 北京 100871
⁵ 中国石油大学(北京)理学院, 北京 102249
⁶ 北京大学材料科学与工程学院, 北京 100871
⁷ 北京大学化学与分子工程学院, 北京 100871

收稿日期:2023-07-04 录用日期:2023-08-16 发布日期:2023-08-28
通讯作者: 胡清梅,关宝璐,尹建波 E-mail:huqm@bgi-graphene.com;gbl@bjut.edu.cn;yinjb-cnc@pku.edu.cn
基金资助:
国家重点研发计划(2020YFA0308900);国家自然科学基金(T2188101);国家自然科学基金(52072043);国家自然科学基金(60908012);国家自然科学基金(61575008);国家自然科学基金(61775007);北京市自然科学基金(4172011)

Graphene Based Room-Temperature Terahertz Detector with Integrated Bow-Tie Antenna

Jiawei Yang¹^,², Chunyang Zheng²^,³, Yahui Pang², Zhongyang Ji²^,⁴, Yurui Li²^,³, Jiayi Hu²^,³, Jiangrui Zhu², Qi Lu²^,⁵, Li Lin²^,³^,⁶, Zhongfan Liu²^,³^,⁵^,⁷, Qingmei Hu²^,*(), Baolu Guan¹^,*(), Jianbo Yin²^,⁴^,*()

¹ Faculty of Information Technology, Beijing University of Technology, Beijing 100124, China
² Beijing Graphene Institute, Beijing 100095, China
³ Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China
⁴ Department of Electronics, Peking University, Beijing 100871, China
⁵ College of Science, China University of Petroleum (Beijing), Beijing 102249, China
⁶ School of Materials Science and Engineering, Peking University, Beijing 100871, China
⁷ College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China

Received:2023-07-04 Accepted:2023-08-16 Published:2023-08-28
Contact: Qingmei Hu, Baolu Guan, Jianbo Yin E-mail:huqm@bgi-graphene.com;gbl@bjut.edu.cn;yinjb-cnc@pku.edu.cn
Supported by:
the National Key R & D Program of China(2020YFA0308900);National Natural Science Foundation of China(T2188101);National Natural Science Foundation of China(52072043);National Natural Science Foundation of China(60908012);National Natural Science Foundation of China(61575008);National Natural Science Foundation of China(61775007);Natural Science Foundation of Beijing, China(4172011)

1. 附件.pdf(875KB)

摘要/Abstract

摘要：

高灵敏度、可室温下工作的太赫兹(THz)探测器是太赫兹在生物技术、量子传输、通信、成像等领域得以应用的关键。本文报道了一种石墨烯太赫兹探测器设计方法，该探测器通过将蝶形天线与石墨烯pn结构建至一个器件中，利用蝶形金属天线将波长为110 μm (2.7 THz)的太赫兹远场光汇聚至约800 nm的石墨烯THz吸收层，同时将这蝶形天线的两极设计为两个独立栅极，将800 nm的吸收层转变为可分离光电子的pn结区，通过增强局域光场增加太赫兹吸收，并同时增强光电子分离效率，将正交极化方向的消光比提升了1到2个数量级，在室温下实现了较低的噪声等效功率(NEP) ~1 nW∙Hz^−1/2。这一设计为太赫兹探测提供了新的技术路径。

关键词: 石墨烯, 蝶形天线, 太赫兹探测器, pn结

Abstract:

In electromagnetic spectrum, terahertz (THz) wave is between light and microwave. Its photon energy is much lower than normal infrared light and its frequency is higher than microwave. Therefore, it is hard to implement techniques of these two spectral ranges into THz spectrum, especially techniques in generation, modulation and detection. This has hindered the exploitation of THz spectrum although recent studies have showed its promising potentials in industries such as semiconductors, biotechnology, communications, imaging and so on. In THz detection, it is critical to have detectors with high response speed, high sensitivity and capability of operating at room temperature. In this study, we have designed a bow-tie antenna and integrated it into a graphene photodetector. By simulating with finite element analysis, we optimize the total length of the bow-tie antenna as about 50 μm and a gap of about 800 nm in the middle in order to target at 2.7 THz wave. By design, the antenna localizes the THz radiation to the narrow gap and enhances the local electric field by more than 20 times. Inside the same narrow gap, we build a graphene pn junction by applying different voltages on the two halves of the antenna, which also function as two independent gate electrodes in the device. In this device geometry, the absorption enhancement region overlaps with photocarrier separation regions in graphene, which therefore greatly increases photocurrent generation as firstly reported in Ref. 25. In addition to the antenna, we also design the channel. Firstly, we use BN-encapsulated graphene which has shown low residual doping (residual doping concentration of 1.3 × 10¹¹ cm⁻²) and high mobility (μ up to 20000 cm²∙V⁻¹∙s⁻¹ at room temperature) in the device. The high‑quality graphene as channel guarantees a large seeback-coefficient difference at the pn junction and fast photoresponse. Secondly, the channel width at the antenna gap is reduced for further increasing the electron temperature and photocarrier-separating efficiency. Whereas the channel width at the contact is maintained for decreasing the contact resistance. With the antenna and channel design in an as-fabricated device, the photocurrent is enhanced by up to 2 orders of magnitude when the polarization of incident wave coincides with the optimized polarization of the antenna. The corresponding noise equivalent power (NEP) is calculated as about 1 nW∙Hz^−1/2 if Johnson-Nyquist noise is assumed as the dominating noise. Moreover, the operating frequency is measured as larger than 5 kHz, which, together with the enhanced photoresponse, indicates that our design is a promising candidate for THz detection.

Key words: Graphene, Bow-tie antenna, Terahertz detector, pn junction

杨嘉炜, 郑春阳, 庞亚会, 纪仲阳, 李雨芮, 胡嘉仪, 朱江瑞, 陆琪, 林立, 刘忠范, 胡清梅, 关宝璐, 尹建波. 耦合蝶形天线的石墨烯室温太赫兹探测器[J]. 物理化学学报, 2023, 39(10), 2307012. doi: 10.3866/PKU.WHXB202307012

Jiawei Yang, Chunyang Zheng, Yahui Pang, Zhongyang Ji, Yurui Li, Jiayi Hu, Jiangrui Zhu, Qi Lu, Li Lin, Zhongfan Liu, Qingmei Hu, Baolu Guan, Jianbo Yin. Graphene Based Room-Temperature Terahertz Detector with Integrated Bow-Tie Antenna[J]. Acta Phys. -Chim. Sin. 2023, 39(10), 2307012. doi: 10.3866/PKU.WHXB202307012

链接本文: https://www.whxb.pku.edu.cn/CN/10.3866/PKU.WHXB202307012

https://www.whxb.pku.edu.cn/CN/Y2023/V39/I10/2307012

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耦合蝶形天线的石墨烯室温太赫兹探测器

Graphene Based Room-Temperature Terahertz Detector with Integrated Bow-Tie Antenna

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