基于宏观金属辅助化学刻蚀制备硅纳米线的研究

doi:10.3866/PKU.WHXB201602183

Abstract

Abstract:

To understand the principles of the fabrication of nanowire arrays using macroscopic metal-assisted chemical etching (MACE), Si nanowires (SiNWs) are synthesized using Ag-coated Si substrates and Pt electrodes by the macroscopic MACE. Analysis of the SiNWmorphology coupled with the corresponding current density in the MACE process is applied to systematically investigate the effects of the electrical connection, Ag coating, etching conditions, Si substrates, and light irradiation on the formation of SiNWs. It is found that there is a certain relationship between the current density and the SiNWlength. Amode is proposed to fundamentally understand the mechanisms of the preparation of SiNWs using MACE. Associated opportunities are also discussed.

Key words: Semiconductor, Microstructure, Electrochemistry, Silicon nanowire, Metal etching

Lin LIU,Zhi-Sheng LI,Hui-Dong HU,Wei-Li SONG. Insight into Macroscopic Metal-Assisted Chemical Etching for Silicon Nanowires[J]. Acta Phys. -Chim. Sin. 2016, 32(4), 1019-1028. doi: 10.3866/PKU.WHXB201602183

References

1	Brodoceanu D. ; Alhmoud H. Z. ; Elnathan R. ; Delalat B. ; Voelcker N. H. ; Kraus T. Nanotechnology 2016, 27, 075301.
2	Cao M. S. ; Yang J. ; Song W. L. ; Zhang D. Q. ; Wen B. ; Jin H. B. ; Hou Z. L. ; Yuan J. ACS Appl. Mater. Interfaces 2012, 4, 6948.
3	Cao M. S. ; Song W. L. ; Hou Z. L. ; Yang J. Carbon 2010, 48 (788)
4	Cao M. S. ; Shi X. L. ; Fang X. Y. ; Jin H. B. ; Hou Z. L. ; Zhou W. ; Chen Y. J. Appl. Phys. Lett 2007, 91, 203110.
5	Zhou X. ; Sun M. Q. ; Wang G. C. Acta Phys. -Chim. Sin 2016, 32, 975.
5	周晓; 孙敏强; 王庚超. 物理化学学报, 2016, 32, 975.
6	Wang J. D. ; Peng T. J. ; Xian H. Y. ; Sun H. J. Acta Phys. -Chim. Sin 2015, 31, 90.
6	汪建德; 彭同江; 鲜海洋; 孙红娟. 物理化学学报, 2015, 31, 90.
7	Hu R. J. ; Wang J. ; Zhu H. C. Acta Phys. -Chim. Sin 2015, 31, 1997.
7	胡瑞金; 王兢; 朱慧超. 物理化学学报, 2015, 31, 1997.
8	Wagner R. S. ; Ellis W. C. Appl. Phys. Lett 1964, 4, 89.
9	Lee G. ; Woo Y. S. ; Yang J. E. ; Lee D. H. ; Kim C. J. ; Jo M. H. Angew. Chem. Int. Edit 2009, 48, 7366.
10	Kolasinski K. W. Curr. Opin. Solid State Mater. Sci 2005, 9, 73.
11	Lehmann V. ; Stengl R. ; Luigart A. Mater. Sci. Eng. B 2000, 69, 11.
12	Peng K. Q. ; Wu Y. ; Fang H. ; Zhong X. Y. ; Xu Y. ; Zhu J. Angew. Chem. Int. Edit 2005, 44, 2737.
13	Peng K. Q. ; Zhu J. Electrochim. Acta 2004, 49 (2563)
14	Liu L. ; Peng K. Q. ; Hu Y. ; Wu X. L. ; Lee S. T. Adv. Mater 2014, 26, 1410.
15	Huang Z. P. ; Geyer N. ; Werner P. ; Boor J. D. ; Gösele U. Adv. Mater 2011, 23, 285.
16	Hochbaum A. I. ; Chen R. ; Delgado R. D. ; Liang W. J. ; Garnett E. C. ; Najarian M. ; Majumdar A. ; Yang P. D. Nature 2008, 451, 163.
17	Brammer K. S. ; Choi C. ; Oh S. ; Cobb C. J. ; Connelly L. S. ; Loya M. ; Kong S. D. ; Jin S. Nano Lett 2009, 9, 3570.
18	Liu L. ; Wang Y. T. Acta Phys. Sin 2015, 64, 148201.
19	Liu L. Sci. China Tech. Sci 2015, 58, 362.
20	Tsujino K. ; Matsumura M. Adv. Mater 2005, 17, 1045.
21	Liu L. J. Mater. Chem. C 2014, 2 (9631)
22	Ashruf C. M. A. ; French P. J. ; Bressers P. M. M. C. ; Kelly J. J. Sens. Actuators 1999, 74, 118.
23	Ashruf C. M. A. ; French P. J. ; Sarro P. M. ; Kazinczi R. ; Xia X. H. ; Kelly J. J. J. Micromech. Microeng 2000, 10, 505.
24	Xia X. H. ; Ashruf C. M. A. ; French P. J. ; Kelly J. J. Chem. Mater 2000, 12, 1671.
25	Kelly J. J. ; Xia X. H. ; Ashruf C. M. A. ; French P. J. IEEE Sens. J 2001, 1, 127.
26	Song Y. Y. ; Gao Z. D. ; Kelly J. J. ; Xia X. H. Electrochem. Solid-State Lett 2005, 8
27	Huang Z. P. ; Geyer N. ; Liu L.F. ; Li M. Y. ; Zhong P. Nanotechnology 2010, 21, 465301.
28	Chourou M. L. ; Fukami K. ; Sakka T. ; Virtanen S. ; Ogata Y. H. Electrochim. Acta 2010, 55, 903.
29	Kim J. ; Rhu H. ; Lee W. J. Mater. Chem 2011, 15889
30	Weisse J. M. ; Lee C. H. ; Kim D. R. ; Cai L. ; Rao P. M. ; Zheng X. Nano Lett 2013, 13, 4362.
31	Lai C. Q. ; Zheng W. ; Choi W. K. ; Thompson C. V. Nanoscale 2015, 7, 11123.
32	Huang Z. P. ; Zhang X. X. ; Reiche M. ; Liu L. F. ; Lee W. ; Shimizu T. ; Senz S. ; Gösele U. Nano Lett 2008, 8, 3046.
33	Huang Z. P. ; Shimizu T. ; Senz S. ; Zhang Z. ; Zhang X. X. ; Lee W. ; Geyer N. ; Gösele U. Nano Lett 2009, 9, 2519.
34	VanDjlk H. J. A. ; de Jonge J. J. Electrochem. Soc 1970, 177, 553.
35	Theunissen M. J. J. ; Appels J. A. ; Verkuylen W. H. C.G. J. Electrochem. Soc 1970, 117, 959.
36	Meek R. L. J. Electrochem. Soc 1971, 118, 437.
37	Föll H. Appl. Phys. A 1991, 53, 8.
38	Lehmann V. J. Electrochem. Soc 1993, 140, 2836.
39	Bertagna V. ; Plougonven C. ; Rouelle F. ; Chemla M. J. Electrochem. Soc 1996, 143, 3532.

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Insight into Macroscopic Metal-Assisted Chemical Etching for Silicon Nanowires

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