Acta Phys. -Chim. Sin. ›› 1998, Vol. 14 ›› Issue (09): 799-803.doi: 10.3866/PKU.WHXB19980907

• ARTICLE • Previous Articles     Next Articles

Chemcal Control of Facet Appearance of Diamond

Chen You-Cun, Xie Fang-Qing, Zhang Qing-Zhe, Lin Zhang-Da   

  1. The State Key Labaratory of Surface Physics,Insitute of Physics,Chinese Academy of Sciences,Beijing 100080
  • Received:1998-01-14 Revised:1998-03-09 Published:1998-09-15
  • Contact: Xie Fang-Qing


 The influence of N2 and O2 on the facet appearance of diamond has been studied with hot filament chemical vapor deposition (HFCVD). It was f0und that adding minor amount of N2(V(N2)/V(CH4)<1%) and O2 (V(O2)/V(CH4)20%) to the source gas is favorable for the facet appearance of diamond (100) and (111) respectively. By the chemical control of textured growth of diamond (111) with adding O2, the FWHM of the rocking curve of X-ray (111) peak can be reduced to 6.2° The temperature window of substrate for the textured growth of diamond(100) or (111) was enlarged with the addition of N2 or O2.

Key words: Diamond, Textured growth, Chemical vapor deposition, Facet appearance