Acta Phys. -Chim. Sin. ›› 2009, Vol. 25 ›› Issue (05): 835-839.doi: 10.3866/PKU.WHXB20090504

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Electrochemical Behavior of ITO Films during Anodic and Cathodic Polarization in Sodium Hydroxide Solutions

WANG Hao, ZHONG Cheng, JIANG Cheng-Jie, GU Xiong, LI Jin, JIANG Yi-Ming   

  1. Department of Material Science, Fudan University, Shanghai 200433, P. R. China
  • Received:2008-12-01 Revised:2009-01-15 Published:2009-05-04
  • Contact: JIANG Yi-Ming E-mail:ymjiang@fudan.edu.cn

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Abstract:

The electrochemical corrosion behaviors of indiumtin oxide (ITO) films were investigated by electrochemical methods in sodium hydroxide solutions. A cyclic voltammetric study of ITO films using both anodic and cathodic polarization was undertaken. Transmittance spectra, sheet resistance, scanning electron microscopy (SEM), energy dispersive X-ray fluorescence spectrometry (EDS) and X-ray diffraction (XRD) analysis were used to characterize the severity of corrosion, the corrosion morphology and to identify the corrosion product. The ITO films remained stable after anodic polarization (approximately 1.5 V vs saturated calomel electrode (SCE)). In contrast, serious corrosion occurred during cathodic polarization (approximately -1.5 V (vs SCE)). Optical transmittance decreased greatly and sheet resistance increased by an order of magnitude. Some In3+ ions in the ITO electrode are reduced to metallic In attached to the surface.

Key words: ITO Film, Cyclic voltammetry, Cathodic polarization, Electrochemical corrosion